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1、INTERNATIONA1.STANDARDISO29301editionThid2023-10Microbeamana1.ysisAna1.ytica1.e1.ectronmicroscopyMethodsforca1.ibratingimagemagnicationbyusingreferencemateria1.swithperiodicstructuresAna1.yseparmicrofaisceaux-Microscopiee1.ectroniqueana1.ytiqueMethodesd,eta1.onnagedugrandissementd,imageaumoyendemate
2、hauxderf6rencedestructurespdri&diquesISO2023COPYRIGHTPROTECTEDDOCUMENTISO2023IUirhM*hedbdi1.iUedotherwiseupdhi.o啪InyM1.tta0DmkfifiU81.andonnet8CH-1214Vernier,GenevaPhone：M1.22749O1.11觥ftte:丽丽BQrgPub1.ishedinSwitzer1.andContentsPageForewordivIntroductionv2 Scope13 Normativereferences14 Termsanddefini
3、tions1Imagemagnification54.154.2Definitionoftheimagemagnification5Expressingmagnification6Referencemateria1.s5.15.2Gcncrs1.6RequirementsforCRMZRM7Ca1.ibrationprocedures76.16.2GCne31MountingCRM/RM86.36.56aptug瑶【ionsforca1.ibration8Digitizingtheimagerecordedonphotographicfi1.m10651Genera1.106.6品瑜。SU拙楣
4、和8km湿rf三加岫础df阳如甜gitizedimageW6.6.1 Genera1.126.6.2 Measurementprocedure136三MofSiZeca1.ibrationu6.6.3 Ca1.ibrationOfsca1.eunit(=pixe1.size),S166.96(rat1.onC的飒而a配则归驷.86.9.1 Genera1.186.9.2 Basicsca1.esizecorrespondingtoonepixe1.onthedigitizedimage19Accuracyofimagemagnification20Uncertaintyofmeasuremen
5、tresu1.t21Ca1.ibrationreport239.19.2Genera1.23Contentsofca1.ibrationreport23Annex(informative)Parametersthatinf1.uencetheresu1.tantmagnificationofaTEM2SAnnex B (informative)F1.owchartofimage-magnificationca1.ibrationprocedure26Annex C (informative)Howtodecidethenumberof1.inesforaveraging27Annex D (i
6、nformative)Referencemateria1.sformagnificationca1.ibration29Annex E (informative)Examp1.eoftestreportforca1.ibrationofTKMmagnication33Bib1.iography44ForewordISO(theInternationa1.OrganizationforStandardization)isawor1.dwidefederationofnationa1.standardsttiugh(ISOmrtmiw)bMdniK盟RAucekdHpfff1.QbbGgbodyI
7、committeehasbeenestab1.ishedhastherighttoberepresentedonthatcommittee.Internationa1.organizations,governmenta1.andnon-governmenta1.,in1.iaisonwithISO,a1.sotakepartinthework.ISOco1.1.aboratesc1.ose1.ywiththee1.ectrotechnica1.standardization.Internationa1.E1.ectrotechnica1.Commission(IEC)ona1.1.matter
8、sofTheproceduresusedtodeve1.opthisdocumentandthoseintendedforitsfurthermaintenancearedyiFFHSof1.S0getW1.kes,sK8Gid1.motcgt11w1.gverordance曲htheeditoria1.ru1.esoftheISO/IECDirectives.Part2(seewwsv.iso.org/direc1.ives).N(叼黄区n1.s)a比SH%ntakes1.*2f托舐与设瓢oncfBf在MrIh8N猫HntmafAMS1.vcc1.aimedpatentrightsinres
9、pectthereof.Asofthedateofpub1.icationofthisdocumentISOhadnotreceivednoticeof（八）patent(三)whichmayberequiredtoimp1.ementthisdocument.However,imp1.ementersare懈怖翻琳躺/mj，wWjSOQFg/眸IentS洗蝮油那ion,扁MMSPOn赖岫油嬲9的阳躲Ora1.suchpatentrights.Anytradeusedinthisconstitutenameendorsenent.documentisinformationgivenforthe
10、convenienceofusersanddoesnotForanexp1.anationofthevo1.untarynatureofstandards,themeaningofISOspecifictermsand幽幽蛔豳酒侬遮W即辆0)aSSEif1.毗嘱nwe帼1.丸nBar池帆四dead朝乩CSvbr11isoorgisoforeword.htmI.犯睨Mq加彼JH诚外TeChniCa1.CommitteeISO/TC202,Microbeamana1.ysis,SubcommitteeThisthirdeditioncance1.sandrep1.acesthesecondedit
11、ion(ISO29301:2017),ofwhichitconstitutesaminorrevision.Thechangesareasfo1.1.ows:thee1.ementnameofSi1.verinTab1.eD.1.hasbeencorrectedtoSi1.icon;normativereferencesin4HHe-2havebeenupdated.nyfeedbackorquestionsonthisdocumentShoUkUstandardsbody.Acomp1.ete1.istingofthesebodiescanbefoundatwww.iso.org/membe
12、rs.htm1.IntroductionThetransmissione1.ectronmicroscope(TEM)iswide1.yusedtoinvestigatethemicro/nano-structureg1.ass,r3oedofiditiptf1.nbateria1.s.suchTh(SeJniCbnrtmorsjnvo1.ve9ub(aiano隼antin1.eftimvIrirX1.COnImhn)Uganu1.tra-thinspecimen,interactingwiththespecimenastheypassthrough.Thisinteractionresu1.
13、tsinamagnifiedimagewhichisfocusedontoanimagingdevice,suchasaphotographicfi1.m,animagingR1.g1.ferres81.1.帆ror翩IV犍MiWo螂*feMuse4ab1.xamiMsSi醐1.ant1.yasasing1.eatomicco1.umninagivenspecimen.ThisdocumentaddressestheneedformagnificationCahbrationoftheimages.Itdescribestherequirementsforca1.ibrationoftheim
14、agemagnificationinthepK1.H1.fiPttOrectronmicroscoPeUSingacertifiedreferencemateria1.orareferencemateria1.withISO2023-A1.1.rightsreservedMicrobeamana1.ysisAna1.ytica1.e1.ectronmicroscopyMethodsforca1.ibratingimagemagnificationbyusingreferencemateria1.swithperiodicstructures1 Scopemagni11cationpossessaPeriodictransmissione1.ectronmicroscopegratingreferencesuper-1.atticestructureThisdocumentisapp
