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1、ISOInternationalStandardISO11505Secondedition2025-06Surfacechemicalanalysis一GeneralproceduresforquantitativecompositionaldepthprofilingbyglowdischargeopticalemissionspectrometryAnalysechimiquedessurfacesModesOperatoiresgenerauxpourIeprofilageenprofondeurCompositionnelquantitatifparSpectrometriedemis
2、sionoptiqueadechargeIuminescenteReferencenumberISO11505:2025(en)COPYRIGHTPROTECTEDDOCUMENTISO2025Allrightsreserved.Unlessotherwisespecified,orrequiredinthecontextofitsimplementation,nopartofthispublicationmaybereproducedorutilizedotherwiseinanyformorbyanymeans,electronicormechanical,includingphotoco
3、pying,orpostingontheinternetoranintranet,withoutpriorwrittenpermission.PermissioncanberequestedfromeitherISOattheaddressbeloworISO,smemberbodyinthecountryoftherequester.ISOcopyrightofficeCP401Ch.deBlandonnet8CH-1214Vernier,GenevaPhone:+41227490111Email:copyrightiso.orgWebsite:www.iso.orgPublishedinS
4、witzerlandContentsPageForewordv1 Scope12 Normativereferences13 Termsanddefinitions14 Principle15 Apparatus25.1 Glowdischargeopticalemissionspectrometer25.1.1 General25.1.2 Selectionofspectrallines25.1.3 Selectionofglowdischargesourcetype26 Adjustingtheglowdischargespectrometersystemsettings36.1 Gene
5、ral.36.2 SettingthedischargeparametersofaDCsource46.2.1 Constantappliedcurrentandvoltage46.2.2 Constantappliedcurrentandpressure56.2.3 Constantappliedvoltageandpressure56.3 SettingthedischargeparametersofanRFsource66.3.1 Constantappliedpowerandpressure66.3.2 ConstantappliedpowerandDCbiasvoltage66.3.
6、3 ConstanteffectivepowerandRFvoltage76.4 Minimumperformancerequirements76.4.1 General76.4.2 Controloflampcleanlinessandstart-upperformance76.4.3 Minimumrepeatabilitry96.4.4 Detectionlimit97 Sampling118 Calibration118.1 General118.2 Calibrationspecimens118.2.1 General118.2.2 Low-alloyironorsteelspeci
7、mens128.2.3 Stainless-steelspecimens128.2.4 High-oxygenspecimens128.2.5 High-carbonspecimens128.2.6 High-nitrogenspecimens128.2.7 High-puritycopperspecimens128.2.8 High-purityzincspecimens138.3 Validationspecimens138.4 Determinationofthesputteringrateofcalibrationandvalidationspecimens138.5 Emission
8、intensitymeasurementsofcalibrationspecimens148.6 Calculationofcalibrationformulae148.7 Validationofthecalibration148.7.1 General148.7.2 Checkinganalyticalaccuracyusingbulkreferencematerials158.7.3 Checkinganalyticalaccuracyusingsurfacelayerreferencematerials158.8 Verificationanddriftcorrection159 An
9、alysisoftestspecimens169.1 Adjustingdischargeparameters169.2 Settingofmeasuringtimeanddataacquisitionrate169.3 Quantifyingdepthprofilesoftestspecimens1610 Expressionofresults1610.1 Expressionofquantitativedepthprofile1610.2 Determinationoftotalcoatingmassperunitarea1710.3 Determinationofaveragemassf
10、ractions1811 Precision1812 Testreport18AnnexA(normative)Calculationofcalibrationconstantsandquantitativeevaluationofdepthprofiles19AnnexB(informative)Suggestedspectrallinesfordeterminationofgivenelements32Bibliography34ForewordISO(theInternationalOrganizationforStandardization)isaworldwidefederation
11、ofnationalstandardsbodies(ISOmemberbodies).TheworkofpreparingInternationalStandardsisnormallycarriedoutthroughISOtechnicalcommittees.Eachmemberbodyinterestedinasubjectforwhichatechnicalcommitteehasbeenestablishedhastherighttoberepresentedonthatcommittee.Internationalorganizations,governmentalandnon-
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