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1、重离子辐照重离子辐照GaNGaNPage 2能量为能量为500keV剂量为剂量为51014/cm2的的Au+辐照辐照GaN及退火的及退火的X射线衍射分析图射线衍射分析图Page 3能量为能量为500keV剂量为剂量为51015/cm2的的Au+辐照辐照GaN及退火的及退火的X射线衍射分析图射线衍射分析图Page 4Au辐照辐照GaN的的RBS/C研究研究Page 5Transport of Ions in MatterE,Z1E2,Z2E1,Z11.If E2Edisp,then Atomic Displacement.2.If E1Edisp,E2Edisp,then Vacancy;If
2、E2Edisp,then E2 is released as Phonons.3.If E1Edisp,Z1=Z2,then Replacement Collision,E1 is released as Phonons;If Z1Z2,then Z1 becomes a stopped Interstitial Atom.4.If E1Edisp,E2Edisp,then Z1 becomes an interstitial Atom and E1+E2 is released as phonons.Assume:Incident atom has atomic number Z1,ener
3、gy E.collision within the target with an atom of atomic number Z2.After the collision,the incident ion has energy E1 and the struck atom has energy E2.Page 6Transport of Ions in MatterDisplacements=Vacancies+Replacement CollisionsVacancies+Replacement=Interstitials+(Atoms which leave the target volume)入射粒子产生级入射粒子产生级联碰撞的示意图联碰撞的示意图
